Large-Area High Aspect Ratio Plasmonic Interference Lithography Utilizing a Single High-k Mode

Title
Large-Area High Aspect Ratio Plasmonic Interference Lithography Utilizing a Single High-k Mode
Authors
Keywords
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Journal
ACS Nano
Volume 10, Issue 4, Pages 4039-4045
Publisher
American Chemical Society (ACS)
Online
2016-04-14
DOI
10.1021/acsnano.5b06137

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