Very large remanent polarization in ferroelectric Hf1-xZrxO2 grown on Ge substrates by plasma assisted atomic oxygen deposition

Title
Very large remanent polarization in ferroelectric Hf1-xZrxO2 grown on Ge substrates by plasma assisted atomic oxygen deposition
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 114, Issue 11, Pages 112901
Publisher
AIP Publishing
Online
2019-03-18
DOI
10.1063/1.5090036

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