Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition

An all-silicon laser based on silicon nanocrystals with high optical gains

(2018) Dong-Chen Wang et al.   Science Bulletin

X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals

(2017) D. M. Zhigunov et al.   JETP LETTERS

Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors

(2017) Necmi Biyikli et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid

(2016) Yongmin Kim et al.   ACS Applied Materials & Interfaces

Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling

(2016) D. M. Zhigunov et al.   APPLIED PHYSICS LETTERS

Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride

(2016) J. Provine et al.   AIP Advances

Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma

(2015) Harm C. M. Knoops et al.   ACS Applied Materials & Interfaces

Photoluminescence and carrier transport mechanisms of silicon-rich silicon nitride light emitting device

(2015) Wugang Liao et al.   APPLIED SURFACE SCIENCE

Observing the morphology of single-layered embedded silicon nanocrystals by using temperature-stable TEM membranes

(2015) Sebastian Gutsch et al.   Beilstein Journal of Nanotechnology

Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions

(2014) Takafumi Kamimura et al.   APPLIED PHYSICS LETTERS

Wide bandgap engineering of (AlGa)2O3 films

(2014) Fabi Zhang et al.   APPLIED PHYSICS LETTERS

Silicon nanocrystals in SiNx/SiO2 hetero-superlattices: The loss of size control after thermal annealing

(2014) A. Zelenina et al.   JOURNAL OF APPLIED PHYSICS

Measurement of bandgap energies in low-k organosilicates

(2014) M. T. Nichols et al.   JOURNAL OF APPLIED PHYSICS

Absence of quantum confinement effects in the photoluminescence of Si3N4–embedded Si nanocrystals

(2014) D. Hiller et al.   JOURNAL OF APPLIED PHYSICS

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Structural and optical properties of size controlled Si nanocrystals in Si3N4 matrix: The nature of photoluminescence peak shift

(2013) A. Zelenina et al.   JOURNAL OF APPLIED PHYSICS

Enhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment

(2013) Chuan-Feng Shih et al.   OPTICS EXPRESS

Low temperature Ga2O3 atomic layer deposition using gallium tri-isopropoxide and water

(2013) Dong-won Choi et al.   THIN SOLID FILMS

Impact of oxygen bonding on the atomic structure and photoluminescence properties of Si-rich silicon nitride thin films

(2012) P. D. Nguyen et al.   JOURNAL OF APPLIED PHYSICS

Charge Trapping Devices Using a Bilayer Oxide Structure

(2012) Moonkyung Kim et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Silicon nanocrystals produced by solid phase crystallisation of superlattices for photovoltaic applications

(2012) S. Janz et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Quasi-Fermi-level splitting in ideal silicon nanocrystal superlattices

(2011) P. Löper et al.   PHYSICAL REVIEW B

Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices

(2011) A.M. Hartel et al.   THIN SOLID FILMS

Optical characterisation of silicon nanocrystals embedded in SiO2/Si3N4 hybrid matrix for third generation photovoltaics

(2011) Dawei Di et al.   Nanoscale Research Letters

The structural and optical properties of SiO2/Si rich SiNxmultilayers containing Si-ncs

(2009) F Delachat et al.   NANOTECHNOLOGY

Electrical insulation properties of sputter-deposited SiO2, Si3N4and Al2O3films at room temperature and 400 °C

(2009) Hagen Bartzsch et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Characterisation of the silicon nitride thin films deposited by plasma magnetron

(2008) A. Batan et al.   SURFACE AND INTERFACE ANALYSIS