Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices

Published 2011 View Full Article

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Title
Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 1, Pages 121-125
Publisher
Elsevier BV
Online
2011-07-05
DOI
10.1016/j.tsf.2011.06.084

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