Silicon nanocrystals in SiNx/SiO2 hetero-superlattices: The loss of size control after thermal annealing

Title
Silicon nanocrystals in SiNx/SiO2 hetero-superlattices: The loss of size control after thermal annealing
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 24, Pages 244304
Publisher
AIP Publishing
Online
2014-06-26
DOI
10.1063/1.4884839

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