Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

(2015) Chunhua He et al.   IEEE SENSORS JOURNAL

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

(2014) Soner Sonmezoglu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness

(2013) Jianbin Su et al.   Journal of Micro-Nanolithography MEMS and MOEMS

A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant

(2013) Shichang Hu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation

(2013) Arash Hajjam et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes

(2013) Mohannad Elsayed et al.   SENSORS

Constant-frequency oscillation control for vibratory micro-machined gyroscopes

(2013) Huijie Zhu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes

(2011) Xiaoguang Zhao et al.   INTEGRATED FERROELECTRICS

Model-based control concepts for vibratory MEMS gyroscopes

(2011) Markus Egretzberger et al.   MECHATRONICS

Tuning of Superconducting Filters With Laser Ablation Technique

(2009) S. Courreges et al.   IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY

Automatic Mode Matching in MEMS Vibrating Gyroscopes Using Extremum-Seeking Control

(2009) R. Antonello et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Dynamics and control of a MEMS angle measuring gyroscope

(2008) Sungsu Park et al.   SENSORS AND ACTUATORS A-PHYSICAL

Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

(2007) Y. Dong et al.   SENSORS AND ACTUATORS A-PHYSICAL