Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process

Published 2011 View Full Article

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Title
Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process
Authors
Keywords
-
Journal
JOURNAL OF MECHANICAL DESIGN
Volume 133, Issue 11, Pages 111002
Publisher
ASME International
Online
2011-11-12
DOI
10.1115/1.4004790
References
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