Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs

Published 2010 View Full Article

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Title
Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs
Authors
Keywords
-
Journal
MICROELECTRONICS JOURNAL
Volume 42, Issue 4, Pages 585-593
Publisher
Elsevier BV
Online
2010-06-08
DOI
10.1016/j.mejo.2010.05.004

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