Structural design of torsional micro-gyroscope having robust drive and sense modes

Published 2016 View Full Article

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Title
Structural design of torsional micro-gyroscope having robust drive and sense modes
Authors
Keywords
Sense Mode, Flat Region, Laser Doppler Vibrometer, Sense Resonator, Torsional Beam
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 8, Pages 3429-3441
Publisher
Springer Nature
Online
2016-10-05
DOI
10.1007/s00542-016-3157-z
References
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