Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Highly Sensitive Bulk Silicon Chemical Sensors with Sub-5 nm Thin Charge Inversion Layers

(2018) Hossain M. Fahad et al.   ACS Nano

MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

(2018) Seungmin Kwak et al.   Electronic Materials Letters

Gas Detection Microsystem with MEMS Gas Sensor and Integrated Circuit

(2018) Jin Wang et al.   IEEE SENSORS JOURNAL

H2S Sensing in Dry and Humid H2 Environment With p-Type CuO Thick-Film Gas Sensors

(2018) Barbara Urasinska-Wojcik et al.   IEEE SENSORS JOURNAL

A theoretical investigation of the power-law response of metal oxide semiconductor gas sensors Ι: Schottky barrier control

(2018) Zhongqiu Hua et al.   SENSORS AND ACTUATORS B-CHEMICAL

Efficient hierarchical mixed Pd/SnO 2 porous architecture deposited microheater for low power ethanol gas sensor

(2018) Li Xiao et al.   SENSORS AND ACTUATORS B-CHEMICAL

MEMS based highly sensitive dual FET gas sensor using graphene decorated Pd-Ag alloy nanoparticles for H2 detection

(2018) Bharat Sharma et al.   Scientific Reports

Electrohydrodynamic inkjet printing of Pd loaded SnO2 nanofibers on a CMOS micro hotplate for low power H2 detection

(2018) Hao Wu et al.   AIP Advances

Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization

(2017) Langoju Lakshmi Rajeswara Rao et al.   IEEE SENSORS JOURNAL

Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2

(2017) Chengyang Wang et al.   Journal of Micro-Nanolithography MEMS and MOEMS

A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies

(2017) Ronald G. Spruit et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

The critical impact of temperature gradients on Pt filament failure

(2017) Ferenc Bíró et al.   MICROELECTRONICS RELIABILITY

Electrodes for Semiconductor Gas Sensors

(2017) Sung Lee   SENSORS

The Morphologies of the Semiconductor Oxides and Their Gas-Sensing Properties

(2017) Tingting Lin et al.   SENSORS

Sensitive and selective NO 2 gas sensor based on WO 3 nanoplates

(2017) S.S. Shendage et al.   SENSORS AND ACTUATORS B-CHEMICAL

Pt-doped SnO 2 thin film based micro gas sensors with high selectivity to toluene and HCHO

(2017) Jun-gu Kang et al.   SENSORS AND ACTUATORS B-CHEMICAL

ZnO-nanowire size effect induced ultra-high sensing response to ppb -level H 2 S

(2017) Ying Chen et al.   SENSORS AND ACTUATORS B-CHEMICAL

Ultrasensitive WO 3 gas sensors for NO 2 detection in air and low oxygen environment

(2017) Barbara Urasinska-Wojcik et al.   SENSORS AND ACTUATORS B-CHEMICAL

Diagnosis and Classification of 17 Diseases from 1404 Subjects via Pattern Analysis of Exhaled Molecules

(2016) Morad K. Nakhleh et al.   ACS Nano

Multilayer microheater based on glass substrate using MEMS technology

(2016) Wen-Yang Chang et al.   MICROELECTRONIC ENGINEERING

MEMS based metal oxide sensor for simultaneous measurement of gas induced changes of the heating power and the sensing resistance

(2016) B. Bierer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

(2016) S L Marasso et al.   NANOTECHNOLOGY

CMOS Electrochemical Instrumentation for Biosensor Microsystems: A Review

(2016) Haitao Li et al.   SENSORS

NH 3 sensing with self-assembled ZnO-nanowire μHP sensors in isothermal and temperature-pulsed mode

(2016) F. Shao et al.   SENSORS AND ACTUATORS B-CHEMICAL

High precision NH 3 sensing using network nano-sheet Co 3 O 4 arrays based sensor at room temperature

(2016) Zhijie Li et al.   SENSORS AND ACTUATORS B-CHEMICAL

Electrochemically growth of Pd doped ZnO nanorods on QCM for room temperature VOC sensors

(2016) Sadullah Öztürk et al.   SENSORS AND ACTUATORS B-CHEMICAL

An innovative gas sensor incorporating ZnO–CuO nanoflakes in planar MEMS technology

(2016) Bhagaban Behera et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fully inkjet printed SnO 2 gas sensor on plastic substrate

(2016) Mathilde Rieu et al.   SENSORS AND ACTUATORS B-CHEMICAL

Non-silicon MEMS platforms for gas sensors

(2016) A.A. Vasiliev et al.   SENSORS AND ACTUATORS B-CHEMICAL

CMOS MEMS Fabrication Technologies and Devices

(2016) Hongwei Qu   Micromachines

Aerosol-Assisted CVD-Grown WO3 Nanoneedles Decorated with Copper Oxide Nanoparticles for the Selective and Humidity-Resilient Detection of H2S

(2015) Fatima E. Annanouch et al.   ACS Applied Materials & Interfaces

A comprehensive review on synthesis methods for transition-metal oxide nanostructures

(2015) Ting Guo et al.   CRYSTENGCOMM

Electronic noses for food quality: A review

(2015) Amy Loutfi et al.   JOURNAL OF FOOD ENGINEERING

Electrical and morphological characterization of platinum thin-films with various adhesion layers for high temperature applications

(2015) A. Ababneh et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Implementation of high-performance MEMS platinum micro-hotplate

(2015) Fatemeh Samaeifar et al.   Sensor Review

Low power consumption micro C2H5OH gas sensor based on micro-heater and ink jetting technique

(2015) S.E. Moon et al.   SENSORS AND ACTUATORS B-CHEMICAL

Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

(2015) Lei Xu et al.   Scientific Reports

Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor

(2015) Jiaqi Wang et al.   Micromachines

Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review

(2014) P. Bhattacharyya   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C

(2014) Ferenc Biró et al.   MICROELECTRONICS JOURNAL

A low-power, micromachined, double spiral hotplate for MEMS gas sensors

(2014) Mahanth Prasad et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Performance improvement of square microhotplate with insulation layer and heater geometry

(2014) Gaurav Saxena et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

RFID Technology for IoT-Based Personal Healthcare in Smart Spaces

(2014) Sara Amendola et al.   IEEE Internet of Things Journal

Enhanced Gas Sensing Performance of Electrospun Pt-Functionalized NiO Nanotubes with Chemical and Electronic Sensitization

(2013) Jiecai Fu et al.   ACS Applied Materials & Interfaces

Choice of insulation materials and its effect on the performance of square microhotplate

(2013) Gaurav Saxena et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Highly sensitive and selective gas sensors using p-type oxide semiconductors: Overview

(2013) Hyo-Joong Kim et al.   SENSORS AND ACTUATORS B-CHEMICAL

A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

(2012) Lei Xu et al.   IEEE ELECTRON DEVICE LETTERS

Optical gas sensing: a review

(2012) Jane Hodgkinson et al.   MEASUREMENT SCIENCE and TECHNOLOGY

Porous CuO/SnO2 composite nanofibers fabricated by electrospinning and their H2S sensing properties

(2012) Yan Zhao et al.   SENSORS AND ACTUATORS B-CHEMICAL

Classification of multiple indoor air contaminants by an electronic nose and a hybrid support vector machine

(2012) Lei Zhang et al.   SENSORS AND ACTUATORS B-CHEMICAL

A molybdenum MEMS microhotplate for high-temperature operation

(2011) L. Mele et al.   SENSORS AND ACTUATORS A-PHYSICAL

Au-loaded In2O3 nanofibers-based ethanol micro gas sensor with low power consumption

(2011) Xiujuan Xu et al.   SENSORS AND ACTUATORS B-CHEMICAL

Semiconducting metal oxides as sensors for environmentally hazardous gases

(2011) K. Wetchakun et al.   SENSORS AND ACTUATORS B-CHEMICAL

Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications

(2011) J. Courbat et al.   SENSORS AND ACTUATORS B-CHEMICAL

ZnO nanorod gas sensor for ethanol detection

(2011) Liwei Wang et al.   SENSORS AND ACTUATORS B-CHEMICAL

CMOS Interfacing for Integrated Gas Sensors: A Review

(2010) Julian W Gardner et al.   IEEE SENSORS JOURNAL

Development of a Reliable Micro-Hotplate With Low Power Consumption

(2010) Lei Xu et al.   IEEE SENSORS JOURNAL

Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring

(2010) George F. Fine et al.   SENSORS

ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

(2010) S. Santra et al.   SENSORS AND ACTUATORS B-CHEMICAL

Advances of SiC-based MOS capacitor hydrogen sensors for harsh environment applications

(2010) Mun Teng Soo et al.   SENSORS AND ACTUATORS B-CHEMICAL

A 21st century technique for food control: Electronic noses

(2009) Miguel Peris et al.   ANALYTICA CHIMICA ACTA

Meat Quality Assessment by Electronic Nose (Machine Olfaction Technology)

(2009) Mahdi Ghasemi-Varnamkhasti et al.   SENSORS

Stability of thin platinum films implemented in high-temperature microdevices

(2009) R.M. Tiggelaar et al.   SENSORS AND ACTUATORS A-PHYSICAL

New perspectives of gas sensor technology

(2009) Noboru Yamazoe et al.   SENSORS AND ACTUATORS B-CHEMICAL

Gas sensing properties of SnO2 nanowires on micro-heater

(2009) In-Sung Hwang et al.   SENSORS AND ACTUATORS B-CHEMICAL

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

(2008) S.Z. Ali et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology

(2008) Chih-Cheng Lu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane

(2008) P. Bhattacharyya et al.   MICROELECTRONICS RELIABILITY

Recent progress in carbon nanotube-based gas sensors

(2008) Ting Zhang et al.   NANOTECHNOLOGY

Microhotplates with TiN heaters

(2008) J.F. Creemer et al.   SENSORS AND ACTUATORS A-PHYSICAL

Theory of power laws for semiconductor gas sensors

(2007) Noboru Yamazoe et al.   SENSORS AND ACTUATORS B-CHEMICAL