Journal
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 2, Pages 284-286Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2177805
Keywords
Catalytic gas sensors; concave active membrane; methane; Pd-Pt; sol-gel; 3-D microheater
Categories
Funding
- National Basic Research Program of China [2011CB309501, 2012CB934102]
- National Hi-tech Research and Development Program of China [SS2012AA040402]
- National Natural Science Foundation of China (NSFC) [61021064]
- NSFC [60936001, 91123037, 60876037]
Ask authors/readers for more resources
We report a high-performance catalytic gas sensor based on a 3-D microheater. Two catalytic gas sensors were fabricated by sol-gel process, respectively based on a 3-D microheater with a concave active membrane and a comparative 2-D microheater with a rectangular active membrane, introducing Pd-Pt as catalytic material. Test results of the sensor response to methane indicate that the output signal (Delta V), sensitivity, and signal-to-noise ratio of the 3-D microheater-based gas sensor were more than twice of those of the 2-D microheater-based gas sensor. Moreover, it had a higher output signal-to-power ratio (Delta V/P).
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available