A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies

Published 2017 View Full Article

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Title
A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 6, Pages 1165-1182
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-10-11
DOI
10.1109/jmems.2017.2757402

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