Tutorial: The systematics of ion beam sputtering for deposition of thin films with tailored properties

Systematic investigation of the reactive ion beam sputter deposition process of SiO2

(2018) Maria Mateev et al.   EUROPEAN PHYSICAL JOURNAL B

Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

(2018) Grégory Abadias et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Ion beam sputter deposition of TiO2 films using oxygen ions

(2018) Lukas Pietzonka et al.   EUROPEAN PHYSICAL JOURNAL B

Correlation of process parameters and properties of TiO2 films grown by ion beam sputter deposition from a ceramic target

(2017) Carsten Bundesmann et al.   EUROPEAN PHYSICAL JOURNAL B

Reactive ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

(2017) Thomas Lautenschläger et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017

(2017) J. E. Greene   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Reactive Ar ion beam sputter deposition of TiO2 films: Influence of process parameters on film properties

(2017) C. Bundesmann et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

(2016) T. Lautenschläger et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

(2016) Angel Barranco et al.   PROGRESS IN MATERIALS SCIENCE

Energy Distribution of Secondary Particles in Ion Beam Deposition Process of Ag: Experiment, Calculation and Simulation

(2015) C. Bundesmann et al.   CONTRIBUTIONS TO PLASMA PHYSICS

Ion beam sputter deposition of Ge films: Influence of process parameters on film properties

(2015) C. Bundesmann et al.   THIN SOLID FILMS

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

(2014) H. Hofsäss et al.   APPLIED SURFACE SCIENCE

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

(2014) Javier Muñoz-García et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Ion beam sputtering of germanium – Energy and angular distribution of sputtered and scattered particles

(2014) Rene Feder et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles

(2013) René Feder et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Systematic investigations of low energy Ar ion beam sputtering of Si and Ag

(2013) R. Feder et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Ion beam sputter deposition of Ag films: Influence of process parameters on electrical and optical properties, and average grain sizes

(2013) C. Bundesmann et al.   THIN SOLID FILMS

Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence

(2011) M. Tartz et al.   EUROPEAN PHYSICAL JOURNAL D

SRIM – The stopping and range of ions in matter (2010)

(2010) James F. Ziegler et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment

(2010) Adrian Keller et al.   Materials

SDTrimSP-2D studies of the influence of mutual flux arrangement on erosion and deposition

(2009) A. Mutzke et al.   JOURNAL OF NUCLEAR MATERIALS

Large area smoothing of surfaces by ion bombardment: fundamentals and applications

(2009) F Frost et al.   JOURNAL OF PHYSICS-CONDENSED MATTER

A structure zone diagram including plasma-based deposition and ion etching

(2009) André Anders   THIN SOLID FILMS

Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces

(2008) F. Frost et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Ionization probability of sputtered particles as a function of their energy

(2008) Y. Kudriavtsev et al.   APPLIED SURFACE SCIENCE

Stress relaxation and optical characterization of TiO2 and SiO2 films grown by dual ion beam deposition

(2008) C. Bundesmann et al.   THIN SOLID FILMS