Systematic investigations of low energy Ar ion beam sputtering of Si and Ag

Published 2013 View Full Article

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Title
Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 317, Issue -, Pages 137-142
Publisher
Elsevier BV
Online
2013-02-12
DOI
10.1016/j.nimb.2013.01.056

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