Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Published 2014 View Full Article

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Title
Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 310, Issue -, Pages 134-141
Publisher
Elsevier BV
Online
2014-03-31
DOI
10.1016/j.apsusc.2014.03.152

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