Large area smoothing of surfaces by ion bombardment: fundamentals and applications

Title
Large area smoothing of surfaces by ion bombardment: fundamentals and applications
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS-CONDENSED MATTER
Volume 21, Issue 22, Pages 224026
Publisher
IOP Publishing
Online
2009-05-13
DOI
10.1088/0953-8984/21/22/224026

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