Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Title
Self-organized nanopatterning of silicon surfaces by ion beam sputtering
Authors
Keywords
-
Journal
MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume 86, Issue -, Pages 1-44
Publisher
Elsevier BV
Online
2014-10-14
DOI
10.1016/j.mser.2014.09.001

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