Batch fabrication of metal oxide sensors on micro-hotplates

Published 2008 View Full Article

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Title
Batch fabrication of metal oxide sensors on micro-hotplates
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 5, Pages 055015
Publisher
IOP Publishing
Online
2008-04-02
DOI
10.1088/0960-1317/18/5/055015

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