Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates

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Title
Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates
Authors
Keywords
Germanium nanowires, Localized growth, Device integration, Water vapor gas sensor
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 243, Issue -, Pages 669-677
Publisher
Elsevier BV
Online
2016-12-11
DOI
10.1016/j.snb.2016.12.042

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