Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies
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Title
Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies
Authors
Keywords
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Journal
APL Materials
Volume 1, Issue 4, Pages 040701
Publisher
AIP Publishing
Online
2013-10-04
DOI
10.1063/1.4822437
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