Atmospheric Spatial Atomic Layer Deposition of In-Doped ZnO

Spatial Atmospheric Atomic Layer Deposition of AlxZn1–xO

(2013) A. Illiberi et al.   ACS Applied Materials & Interfaces

Enhanced Doping Efficiency of Al-Doped ZnO by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide as an Alternative Aluminum Precursor

(2013) Y. Wu et al.   CHEMISTRY OF MATERIALS

On the environmental stability of ZnO thin films by spatial atomic layer deposition

(2013) Andrea Illiberi et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

High rate (~7 nm/s), atmospheric pressure deposition of ZnO front electrode for Cu(In,Ga)Se2thin-film solar cells with efficiency beyond 15%

(2013) Andrea Illiberi et al.   PROGRESS IN PHOTOVOLTAICS

Growth of ZnOx:Al by high-throughput CVD at atmospheric pressure

(2012) A. Illiberi et al.   JOURNAL OF CRYSTAL GROWTH

Atomic layer deposition of Ga-doped ZnO transparent conducting oxide substrates for CdTe-based photovoltaics

(2012) Paul R. Chalker et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

(2011) A. Illiberi et al.   ACS Applied Materials & Interfaces

Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition

(2011) Angel Yanguas-Gil et al.   CHEMISTRY OF MATERIALS

Self-Limiting Film Growth of Transparent Conducting In2O3 by Atomic Layer Deposition using Trimethylindium and Water Vapor

(2011) Do-Joong Lee et al.   Journal of Physical Chemistry C

Industrial high-rate (∼14nm/s) deposition of low resistive and transparent ZnOx:Al films on glass

(2011) A. Illiberi et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Effective atomic layer deposition procedure for Al-dopant distribution in ZnO thin films

(2010) Jin Yong Kim et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

The Remarkable Thermal Stability of Amorphous In-Zn-O Transparent Conductors

(2008) Matthew P. Taylor et al.   ADVANCED FUNCTIONAL MATERIALS

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films

(2008) M. W. Zhu et al.   JOURNAL OF APPLIED PHYSICS

General mobility and carrier concentration relationship in transparent amorphous indium zinc oxide films

(2008) Andrew J. Leenheer et al.   PHYSICAL REVIEW B