Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition

Published 2011 View Full Article

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Title
Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 19, Pages 4295-4297
Publisher
American Chemical Society (ACS)
Online
2011-09-14
DOI
10.1021/cm2014576

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