On the environmental stability of ZnO thin films by spatial atomic layer deposition
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Title
On the environmental stability of ZnO thin films by spatial atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 6, Pages 061504
Publisher
American Vacuum Society
Online
2013-08-09
DOI
10.1116/1.4816354
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