Effective atomic layer deposition procedure for Al-dopant distribution in ZnO thin films

Authors

Keywords

Journal

Volume 28, Issue 5, Pages 1111-1114

Publisher

American Vacuum Society

Online

2010-09-03

DOI

10.1116/1.3460905

Discuss science. Find collaborators. Network.

Join a conversation

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now