Industrial high-rate (∼14nm/s) deposition of low resistive and transparent ZnOx:Al films on glass

Title
Industrial high-rate (∼14nm/s) deposition of low resistive and transparent ZnOx:Al films on glass
Authors
Keywords
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Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 95, Issue 7, Pages 1955-1959
Publisher
Elsevier BV
Online
2011-02-12
DOI
10.1016/j.solmat.2011.01.007

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