Effect of low thermal budget annealing on surface passivation of silicon by ALD based aluminum oxide films

Titanium di-oxide films using a less hygroscopic colloidal precursor

(2014) Vandana et al.   MATERIALS CHEMISTRY AND PHYSICS

The effect of light soaking on crystalline silicon surface passivation by atomic layer deposited Al2O3

(2013) Baochen Liao et al.   JOURNAL OF APPLIED PHYSICS

Influence of precursor gas ratio and firing on silicon surface passivation by APCVD aluminium oxide

(2013) Kristopher O. Davis et al.   Physica Status Solidi-Rapid Research Letters

Passivation Properties of Atomic-Layer-Deposited Hafnium and Aluminum Oxides on Si Surfaces

(2012) Jun Wang et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells

(2012) G. Dingemans et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Monocrystalline silicon surface passivation by Al2O3/porous silicon combined treatment

(2012) M. Ben Rabha et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Very fast light-induced degradation ofa-Si:H/c-Si(100) interfaces

(2011) Stefaan De Wolf et al.   PHYSICAL REVIEW B

A comparative study of silicon surface passivation using ethanolic iodine and bromine solutions

(2011) Neha Batra et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Silver catalyzed nano-texturing of silicon surfaces for solar cell applications

(2011) Sanjay K. Srivastava et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Effect of surface passivation on generation and recombination lifetimes in silicon wafer studied by impedance spectroscopy

(2010) Sanjai Kumar et al.   APPLIED PHYSICS LETTERS

Interplay of amorphous silicon disorder and hydrogen content with interface defects in amorphous/crystalline silicon heterojunctions

(2010) T. F. Schulze et al.   APPLIED PHYSICS LETTERS

Origin and passivation of fixed charge in atomic layer deposited aluminum oxide gate insulators on chemically treated InGaAs substrates

(2010) Byungha Shin et al.   APPLIED PHYSICS LETTERS

High-Efficiency c-Si Solar Cells Passivated With ALD and PECVD Aluminum Oxide

(2010) Pierre Saint-Cast et al.   IEEE ELECTRON DEVICE LETTERS

Experimental and ab initio infrared study of χ-, κ‐ and α-aluminas formed from gibbsite

(2010) L. Favaro et al.   JOURNAL OF SOLID STATE CHEMISTRY

Hydrogenated amorphous silicon based surface passivation of c-Si at high deposition temperature and rate

(2010) A. Illiberi et al.   Physica Status Solidi-Rapid Research Letters

Influence of oxygen on the sputtering of aluminum oxide for the surface passivation of crystalline silicon

(2010) Tsu-Tsung Andrew Li et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide

(2009) Pierre Saint-Cast et al.   APPLIED PHYSICS LETTERS

Effective surface passivation of crystalline silicon by rf sputtered aluminum oxide

(2009) Tsu-Tsung Li et al.   Physica Status Solidi-Rapid Research Letters

High efficiency n-type Si solar cells on Al2O3-passivated boron emitters

(2008) Jan Benick et al.   APPLIED PHYSICS LETTERS

An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD

(2008) Michael T. Seman et al.   CHEMICAL VAPOR DEPOSITION

Silicon surface passivation by atomic layer deposited Al2O3

(2008) B. Hoex et al.   JOURNAL OF APPLIED PHYSICS

On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3

(2008) B. Hoex et al.   JOURNAL OF APPLIED PHYSICS

Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition

(2007) C. Cibert et al.   THIN SOLID FILMS