Effective surface passivation of crystalline silicon by rf sputtered aluminum oxide

Title
Effective surface passivation of crystalline silicon by rf sputtered aluminum oxide
Authors
Keywords
-
Journal
Physica Status Solidi-Rapid Research Letters
Volume 3, Issue 5, Pages 160-162
Publisher
Wiley
Online
2009-07-01
DOI
10.1002/pssr.200903140

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