Influence of oxygen on the sputtering of aluminum oxide for the surface passivation of crystalline silicon

Published 2010 View Full Article

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Title
Influence of oxygen on the sputtering of aluminum oxide for the surface passivation of crystalline silicon
Authors
Keywords
-
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 95, Issue 1, Pages 69-72
Publisher
Elsevier BV
Online
2010-04-18
DOI
10.1016/j.solmat.2010.03.034

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