Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition

Published 2011 View Full Article

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Title
Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 115, Issue 25, Pages 12317-12321
Publisher
American Chemical Society (ACS)
Online
2011-06-03
DOI
10.1021/jp2023567

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