Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films
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Title
Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 011503
Publisher
American Vacuum Society
Online
2012-12-08
DOI
10.1116/1.4769725
References
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