Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge

Published 2011 View Full Article

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Title
Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 39, Issue 4, Pages 1154-1164
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-02-23
DOI
10.1109/tps.2011.2106516
References
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