Time and energy resolved ion mass spectroscopy studies of the ion flux during high power pulsed magnetron sputtering of Cr in Ar and Ar/N2 atmospheres

Published 2010 View Full Article

Authors

Keywords

Journal

VACUUM

Volume 84, Issue 9, Pages 1159-1170

Publisher

Elsevier BV

Online

2010-02-05

DOI

10.1016/j.vacuum.2010.01.055

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VACUUM

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Reagent

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