Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2

Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge

(2011) Ante Hecimovic et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Discharge physics of high power impulse magnetron sputtering

(2011) André Anders   SURFACE & COATINGS TECHNOLOGY

Intercalation of P atoms in Fullerene-like CPx

(2010) G.K. Gueorguiev et al.   CHEMICAL PHYSICS LETTERS

ERD analysis and modification of TiO2 thin films with heavy ions

(2010) J. Jensen et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Interpretation of electron diffraction patterns from amorphous and fullerene-like carbon allotropes

(2010) Zsolt Czigány et al.   ULTRAMICROSCOPY

Time and energy resolved ion mass spectroscopy studies of the ion flux during high power pulsed magnetron sputtering of Cr in Ar and Ar/N2 atmospheres

(2010) G. Greczynski et al.   VACUUM

Electron Diffraction Based Analysis of Phase Fractions and Texture in Nanocrystalline Thin Films, Part II: Implementation

(2009) János L. Lábár   MICROSCOPY AND MICROANALYSIS

Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge

(2008) A Hecimovic et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Chemical sputtering of carbon by combined exposure to nitrogen ions and atomic hydrogen

(2008) M Schlüter et al.   NEW JOURNAL OF PHYSICS