Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films

A strategy for increased carbon ionization in magnetron sputtering discharges

(2012) Asim Aijaz et al.   DIAMOND AND RELATED MATERIALS

Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2

(2012) S. Schmidt et al.   JOURNAL OF APPLIED PHYSICS

High power impulse magnetron sputtering discharge

(2012) J. T. Gudmundsson et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

(2012) N Brenning et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge

(2011) Ante Hecimovic et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Plasma Deposition of Diamond-Like Carbon

(2011) John Robertson   JAPANESE JOURNAL OF APPLIED PHYSICS

Discharge physics of high power impulse magnetron sputtering

(2011) André Anders   SURFACE & COATINGS TECHNOLOGY

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

(2011) K. Sarakinos et al.   SURFACE & COATINGS TECHNOLOGY

Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

(2010) M. Hala et al.   JOURNAL OF APPLIED PHYSICS

ERD analysis and modification of TiO2 thin films with heavy ions

(2010) J. Jensen et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Interpretation of electron diffraction patterns from amorphous and fullerene-like carbon allotropes

(2010) Zsolt Czigány et al.   ULTRAMICROSCOPY

Time and energy resolved ion mass spectroscopy studies of the ion flux during high power pulsed magnetron sputtering of Cr in Ar and Ar/N2 atmospheres

(2010) G. Greczynski et al.   VACUUM

Electron Diffraction Based Analysis of Phase Fractions and Texture in Nanocrystalline Thin Films, Part II: Implementation

(2009) János L. Lábár   MICROSCOPY AND MICROANALYSIS

Carbon atom and cluster sputtering under low-energy noble gas plasma bombardment

(2008) E. Oyarzabal et al.   JOURNAL OF APPLIED PHYSICS

Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge

(2008) A Hecimovic et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Chemical sputtering of carbon by combined exposure to nitrogen ions and atomic hydrogen

(2008) M Schlüter et al.   NEW JOURNAL OF PHYSICS