High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition

Title
High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume 97, Issue 3, Pages 952-958
Publisher
Wiley
Online
2013-12-14
DOI
10.1111/jace.12706

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