High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition
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Title
High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition
Authors
Keywords
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Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume 97, Issue 3, Pages 952-958
Publisher
Wiley
Online
2013-12-14
DOI
10.1111/jace.12706
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- Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation
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- Silicon Carbide as a Platform for Power Electronics
- (2009) C. R. Eddy et al. SCIENCE
- Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition
- (2008) X ZHAO et al. ACTA MATERIALIA
- Structure analysis of SiCGe films grown on SiC
- (2008) Li Lianbi et al. SURFACE AND INTERFACE ANALYSIS
- Influence of gas pressure on low-temperature preparation and film properties of nanocrystalline 3C-SiC thin films by HW-CVD using SiH4/CH4/H2 system
- (2007) Yusuke Komura et al. THIN SOLID FILMS
- Characterization of polycrystalline SiC films grown by HW-CVD using silicon tetrafluoride
- (2007) Katsuya Abe et al. THIN SOLID FILMS
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