Laser chemical vapor deposition of SiC films with CO2 laser

Title
Laser chemical vapor deposition of SiC films with CO2 laser
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 502, Issue 1, Pages 238-242
Publisher
Elsevier BV
Online
2010-05-05
DOI
10.1016/j.jallcom.2010.04.154

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