High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition

Title
High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume 95, Issue 9, Pages 2782-2784
Publisher
Wiley
Online
2012-07-06
DOI
10.1111/j.1551-2916.2012.05354.x

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