Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation

Published 2009 View Full Article

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Title
Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 15, Issue 6, Pages 875-880
Publisher
Springer Nature
Online
2009-04-06
DOI
10.1007/s00542-009-0836-z

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