Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition

Title
Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 57, Issue 3, Pages 893-902
Publisher
Elsevier BV
Online
2008-12-04
DOI
10.1016/j.actamat.2008.10.031

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