Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure

Published 2010 View Full Article

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Title
Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 13, Issue 7, Pages D53
Publisher
The Electrochemical Society
Online
2010-05-12
DOI
10.1149/1.3418619
References
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