Structure analysis of SiCGe films grown on SiC

Published 2008 View Full Article

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Title
Structure analysis of SiCGe films grown on SiC
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 40, Issue 5, Pages 935-938
Publisher
Wiley
Online
2008-04-01
DOI
10.1002/sia.2806

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