Two-dimensional strain mapping in semiconductors by nano-beam electron diffraction employing a delay-line detector

Nanoscale strain distributions in embedded SiGe semiconductor devices revealed by precession electron diffraction and dual lens dark field electron holography

(2015) D. Cooper et al.   APPLIED PHYSICS LETTERS

Strain mapping at nanometer resolution using advanced nano-beam electron diffraction

(2015) V. B. Ozdol et al.   APPLIED PHYSICS LETTERS

Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution

(2015) Timothy J. Pennycook et al.   ULTRAMICROSCOPY

Efficient phase contrast imaging in STEM using a pixelated detector. Part II: Optimisation of imaging conditions

(2015) Hao Yang et al.   ULTRAMICROSCOPY

High precision two-dimensional strain mapping in semiconductor devices using nanobeam electron diffraction in the transmission electron microscope

(2014) Frieder H. Baumann   APPLIED PHYSICS LETTERS

Strain mapping at the nanoscale using precession electron diffraction in transmission electron microscope with off axis camera

(2014) M. P. Vigouroux et al.   APPLIED PHYSICS LETTERS

3D strain measurement in electronic devices using through-focal annular dark-field imaging

(2014) Suhyun Kim et al.   ULTRAMICROSCOPY

Atomic electric fields revealed by a quantum mechanical approach to electron picodiffraction

(2014) Knut Müller et al.   Nature Communications

Quantitative Annular Dark Field Electron Microscopy Using Single Electron Signals

(2013) Ryo Ishikawa et al.   MICROSCOPY AND MICROANALYSIS

Strain mapping in selected area electron diffraction method combining a Cs-corrected TEM with a stage scanning system

(2013) Fumihiko Uesugi   ULTRAMICROSCOPY

Strain measurement at the nanoscale: Comparison between convergent beam electron diffraction, nano-beam electron diffraction, high resolution imaging and dark field electron holography

(2013) A. Béché et al.   ULTRAMICROSCOPY

Mechanics of silicon nitride thin-film stressors on a transistor-like geometry

(2013) S. Reboh et al.   APL Materials

Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device

(2012) Knut Müller et al.   APPLIED PHYSICS LETTERS

Strain Measurement in Semiconductor Heterostructures by Scanning Transmission Electron Microscopy

(2012) Knut Müller et al.   MICROSCOPY AND MICROANALYSIS

Differential phase-contrast microscopy at atomic resolution

(2012) Naoya Shibata et al.   Nature Physics

Variable magnification dual lens electron holography for semiconductor junction profiling and strain mapping

(2012) Y.Y. Wang et al.   ULTRAMICROSCOPY

Nanobeam Diffraction: Technique Evaluation and Strain Measurement on Complementary Metal Oxide Semiconductor Devices

(2011) P. Favia et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Composition mapping in InGaN by scanning transmission electron microscopy

(2011) Andreas Rosenauer et al.   ULTRAMICROSCOPY

An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices

(2010) Christoph T. Koch et al.   APPLIED PHYSICS LETTERS

Understanding Strain-Induced Drive-Current Enhancement in Strained-Silicon n-MOSFET and p-MOSFET

(2010) Stefan Flachowsky et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Strain: A Solution for Higher Carrier Mobility in Nanoscale MOSFETs

(2009) Min Chu et al.   Annual Review of Materials Research

Improved precision in strain measurement using nanobeam electron diffraction

(2009) A. Béché et al.   APPLIED PHYSICS LETTERS

Direct Mapping of Strain in a Strained Silicon Transistor by High-Resolution Electron Microscopy

(2008) Florian Hüe et al.   PHYSICAL REVIEW LETTERS