An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices

Published 2010 View Full Article

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Title
An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 9, Pages 091901
Publisher
AIP Publishing
Online
2010-03-04
DOI
10.1063/1.3337090
References
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