3D strain measurement in electronic devices using through-focal annular dark-field imaging

Title
3D strain measurement in electronic devices using through-focal annular dark-field imaging
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 146, Issue -, Pages 1-5
Publisher
Elsevier BV
Online
2014-05-11
DOI
10.1016/j.ultramic.2014.04.010

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