Internal current measurements in high power impulse magnetron sputtering

On the film density using high power impulse magnetron sputtering

(2010) Mattias Samuelsson et al.   SURFACE & COATINGS TECHNOLOGY

Faster-than-Bohm Cross-BElectron Transport in Strongly Pulsed Plasmas

(2009) N. Brenning et al.   PHYSICAL REVIEW LETTERS

Dual-magnetron open field sputtering system for sideways deposition of thin films

(2009) Asim Aijaz et al.   SURFACE & COATINGS TECHNOLOGY

Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering

(2008) E. Wallin et al.   EPL

Anomalous electron transport in high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Cross-field ion transport during high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

A bulk plasma model for dc and HiPIMS magnetrons

(2008) N Brenning et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY