Gasless sputtering: Opportunities for ultraclean metallization, coatings in space, and propulsion

Title
Gasless sputtering: Opportunities for ultraclean metallization, coatings in space, and propulsion
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 221503
Publisher
AIP Publishing
Online
2008-06-03
DOI
10.1063/1.2938414

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