Journal of Micro-Nanolithography MEMS and MOEMS

Journal website Submission website

Note: The following journal information is for reference only. Please check the journal website for updated information prior to submission.

Journal Title

J MICRO-NANOLITH MEM

ISSN / eISSN

1932-5150 / 1932-5134

Aims and Scope

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries.

Subject Area

ENGINEERING, ELECTRICAL & ELECTRONIC

MATERIALS SCIENCE, MULTIDISCIPLINARY

NANOSCIENCE & NANOTECHNOLOGY

CiteScore

2.90

View Trend

CiteScore Ranking

Category	Quartile	Rank
Engineering - Mechanical Engineering	Q2	#303/631
Engineering - Electrical and Electronic Engineering	Q3	#399/738
Engineering - Condensed Matter Physics	Q3	#242/423
Engineering - Atomic and Molecular Physics, and Optics	Q3	#123/211
Engineering - Electronic, Optical and Magnetic Materials	Q3	#166/271

Web of Science Core Collection

Science Citation Index Expanded (SCIE)	Social Sciences Citation Index (SSCI)
Indexed	-

Category (Journal Citation Reports 2023)	Quartile
ENGINEERING, ELECTRICAL & ELECTRONIC - SCIE	Q3
MATERIALS SCIENCE, MULTIDISCIPLINARY - SCIE	Q3
NANOSCIENCE & NANOTECHNOLOGY - SCIE	Q4
OPTICS - SCIE	Q3

H-index

Country/Area of Publication

UNITED STATES

Publisher

SPIE

Publication Frequency

Quarterly

Year Publication Started

2007

Open Access

Contact

SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225

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