Understanding the influence of three-dimensional sidewall roughness on observed line-edge roughness in scanning electron microscopy images

Published 2020 View Full Article

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Title
Understanding the influence of three-dimensional sidewall roughness on observed line-edge roughness in scanning electron microscopy images
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 19, Issue 03, Pages -
Publisher
SPIE-Intl Soc Optical Eng
Online
2020-09-12
DOI
10.1117/1.jmm.19.3.034002

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