Recent progress in direct patterning technologies based on nano-imprint lithography

标题
Recent progress in direct patterning technologies based on nano-imprint lithography
作者
关键词
-
出版物
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
Volume 59, Issue 1, Pages 10001
出版商
EDP Sciences
发表日期
2012-07-03
DOI
10.1051/epjap/2012120166

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