Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices

标题
Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2786
出版商
American Vacuum Society
发表日期
2009-12-04
DOI
10.1116/1.3243170

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